Center for Optics & Optical Communications
Lithography
- Raith 150 E-beam Lithography System
- Laurell Spin Processors
- Quintel Contact Mask Alignment System
- Molecular Imprint Nanoimprint System
Metrology
- Alpha Step Surface Profiler
- X-Ray Interferometer
- Zygo 4″ Interferometer
- Veeco General Purpose Phase Shifting Interferometer
- Fisba-Optik Micro Interferometer
Imaging and Characterization
- Z-scan Apparatus
- Nano Alignment Systems
- JEOL Scanning Electron Microscope
- Veeco Scanning Probe Microscope
- Tektronix Semiconductor Parameter Tester
- Woolam Spectroscopic Ellipsometer
- Veeco Nanoscope IV SPM Control Station
- Spectrometers and Microscopes
- STN Probe Station
- Cathodoluminescence
- EDAX
- Deep Level Transient Spectroscopy
Laser Facility
- Fiber Laser Modules
- Continuum Pulsed Q-Switched NDYag Laser
- Research Grade Optical Tables
- ExcelYag Laser Opotic System
- Femtosecond Laser System
Simulation and Modeling
- EM Premier Workstation
- Rsoft
- FemLab
- FDTD
Networking and Fiber Optics
- Fujikura Fusion Splicer Movaz DWDM Optellios Fusion Splicer
- Luna Optical Backscatter Reflectometer
- Opotek Tunable Laser System Melles Griot Bookends with Internal Piezos Optellios Motion Controller Plus End and Edge Polishing Systems Burleigh Photonics Alignment System
- Agilent All Parameter Test Station 81910A
- Newport Ultra Short Laser Pulse Measurement System Tektronix Oscilloscopes
- EXFO Optical Time Domain Reflectometer
- Fiber Optic Connector Polisher
- Exera Fiber Splicing Kit Heat Oven Clean Room Basic Operations
Materials Deposition and Etching
- Rapid Thermal Process System
- Omicron STM/AFM System
- AJA Ion Milling System
- AJA Sputtering Tool
- ICP Compound Semiconductor Etch System
- ICP Dielectric Etch System
- ICP Deep Silicon Etch System
- PECVD
- MOCVD
- K&S Wire Bonder
- Scribe and Break Tool
- Evaporator
- Flip-chip Bonder
- Supercritical Drying Station
Clean Room Basic Operations